EVOS EVOFLO Water Flow Sensor Upgrade Kit
Deptec’s EVOFLO water sensor kit replace the old style proteous flow switches found on the Varian 3000 and XM-90 series of PVD systems. The new sensors, with Deptec’s custom integration kit, allows our users to easily read current flow and set the interlock limits accurately. With no moving parts, the new sensors are less prone to clogging from dirty process cooling water. The visual display reduces the risk of damage to the magetrons buy having too low cooling flow through them while running.